How Can Extreme UV Light Produce Tiny Microchips?

Some analysts say that the end of Moore’s Law is near, but Patrick Naulleau, the director of Berkeley Lab’s Center for X-Ray Optics (CXRO), says that it could be decades before the modern chip runs out of room for improvement thanks to advances in materials and instrumentation enabled by the CXRO. https://newscenter.lbl.gov/2022/06/03/extreme-uv-light-tiny-microchips/